00526nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002900092245007100121260003200192300002000224490003300244856010300277IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819420619 (Print)  cIIA Library  aMotamedi, M. Edward, ed. 0aMiniaturized Systems with Micro-Optics and Micromechanicsh[eBook]  aWashington, USAbSPIEc1996  aOnline resource  aProceedings of SPIE; V. 2687  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/2687yClick Here to Access eBook