@book{28412,
	author = {Motamedi, M. Edward, ed.},
	title = {Miniaturized Systems with Micro-Optics and Micromechanics},
	publisher = {SPIE},
	year = {1996},
	series = {Proceedings of SPIE; V. 2687},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2687}
}