Motamedi, M. Edward, ed. <br/><br/>
Miniaturized Systems with Micro-Optics and MEMS  [eBook] 

 - Washington, USA  SPIE  1999 
 - Online resource 
 - Proceedings of SPIE; V. 3878 .
<br/><br/><label>ISBN: </label>9780819434753 (Print)