TY  - BOOK
AU  - Gorecki, Christophe, ed.
TI  - Microsystems Metrology and Inspection
T2  - Proceedings of SPIE; V. 3825
SN  - 9780819433114 (Print)
PY  - 1999///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3825
ER  -