00506nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002900092245005100121260003200172300002000204490003300224856010300257IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819433114 (Print)  cIIA Library  aGorecki, Christophe, ed. 0aMicrosystems Metrology and Inspectionh[eBook]  aWashington, USAbSPIEc1999  aOnline resource  aProceedings of SPIE; V. 3825  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/3825yClick Here to Access eBook