00523nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002900092245006800121260003200189300002000221490003300241856010300274IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819450159 (Print)  cIIA Library  aGorecki, Christophe, ed. 0aMicrosystems Engineering: Metrology and Inspection IIIh[eBook]  aWashington, USAbSPIEc2003  aOnline resource  aProceedings of SPIE; V. 5145  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/5145yClick Here to Access eBook