TY  - BOOK
AU  - Gorecki, Christophe, ed.
TI  - Microsystems Engineering: Metrology and Inspection
T2  - Proceedings of SPIE; V. 4400
SN  - 9780819440952 (Print)
PY  - 2001///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4400
ER  -