TY  - BOOK
AU  - Sulzmann, Armin, ed.
TI  - Microrobotics and Microsystem Fabrication
T2  - Proceedings of SPIE; V. 3202
SN  - 9780819426345 (Print)
PY  - 1998///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3202
ER  -