00525nam a2200157Ia 4500003000900000008004100009020002600050020002700076040001600103100002200119245003600141260003200177300002000209490003400229856010400263IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510623385 (Print)  a9781510623392 (Online)  cIIA Library  aWang, Yuelin, ed. 0aMicro-Optics and MOEMSh[eBook]  aWashington, USAbSPIEc2018  aOnline resource  aProceedings of SPIE; V. 10848  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/10848yClick Here to Access eBook