@book{28326,
	author = {Wang, Yuelin, ed.},
	title = {Micro-Optics and MOEMS},
	publisher = {SPIE},
	year = {2018},
	series = {Proceedings of SPIE; V. 10848},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10848}
}