00536nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002700092245008300119260003200202300002000234490003300254856010300287IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819421692 (Print)  cIIA Library  aParriaux, Olivier, ed. 0aMicro-Optical Technologies for Measurement, Sensors, and Microsystemsh[eBook]  aWashington, USAbSPIEc1996  aOnline resource  aProceedings of SPIE; V. 2783  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/2783yClick Here to Access eBook