TY  - BOOK
AU  - Monahan, Kevin, ed.
TI  - Micron and Submicron Integrated Circuit Metrology
T2  - Proceedings of SPIE; V. 0565
SN  - 9780892526000 (Print)
PY  - 1986///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0565
ER  -