00513nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002400092245006300116260003200179300002000211490003300231856010300264IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780892526000 (Print)  cIIA Library  aMonahan, Kevin, ed. 0aMicron and Submicron Integrated Circuit Metrologyh[eBook]  aWashington, USAbSPIEc1986  aOnline resource  aProceedings of SPIE; V. 0565  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0565yClick Here to Access eBook