Johnson, Eric, ed. <br/><br/>
Micromachining Technology for Micro-Optics and Nano-Optics III  [eBook] 

 - Washington, USA  SPIE  2005 
 - Online resource 
 - Proceedings of SPIE; V. 5720 .
<br/><br/><label>ISBN: </label>9780819456946 (Print)