TY  - BOOK
AU  - Johnson, Eric, ed.
TI  - Micromachining Technology for Micro-Optics and Nano-Optics II
T2  - Proceedings of SPIE; V. 5347
SN  - 9780819452559 (Print)
PY  - 2003///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5347
ER  -