Johnson, Eric, ed. <br/><br/>
Micromachining Technology for Micro-Optics and Nano-Optics II  [eBook] 

 - Washington, USA  SPIE  2003 
 - Online resource 
 - Proceedings of SPIE; V. 5347 .
<br/><br/><label>ISBN: </label>9780819452559 (Print)