@book{28313,
	author = {Johnson, Eric, ed.},
	title = {Micromachining Technology for Micro-Optics and Nano-Optics II},
	publisher = {SPIE},
	year = {2003},
	series = {Proceedings of SPIE; V. 5347},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5347}
}