TY  - BOOK
AU  - Johnson, Eric, ed.
TI  - Micromachining Technology for Micro-Optics and Nano-Optics
T2  - Proceedings of SPIE; V. 4984
SN  - 9780819447845 (Print)
PY  - 2003///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4984
ER  -