00521nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002300092245007200115260003200187300002000219490003300239856010300272IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819447845 (Print)  cIIA Library  aJohnson, Eric, ed. 0aMicromachining Technology for Micro-Optics and Nano-Opticsh[eBook]  aWashington, USAbSPIEc2003  aOnline resource  aProceedings of SPIE; V. 4984  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/4984yClick Here to Access eBook