@book{28312,
	author = {Johnson, Eric, ed.},
	title = {Micromachining Technology for Micro-Optics and Nano-Optics},
	publisher = {SPIE},
	year = {2003},
	series = {Proceedings of SPIE; V. 4984},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4984}
}