TY  - BOOK
AU  - Lee, Sing, ed.
TI  - Micromachining Technology for Micro-Optics
T2  - Proceedings of SPIE; V. 4179
SN  - 9780819438355 (Print)
PY  - 2000///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4179
ER  -