00501nam a2200145Ia 4500003000900000008004100009020002600050040001600076100001900092245005600111260003200167300002000199490003300219856010300252IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819438355 (Print)  cIIA Library  aLee, Sing, ed. 0aMicromachining Technology for Micro-Opticsh[eBook]  aWashington, USAbSPIEc2000  aOnline resource  aProceedings of SPIE; V. 4179  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/4179yClick Here to Access eBook