@book{28311,
	author = {Lee, Sing, ed.},
	title = {Micromachining Technology for Micro-Optics},
	publisher = {SPIE},
	year = {2000},
	series = {Proceedings of SPIE; V. 4179},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4179}
}