00526nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002700092245007300119260003200192300002000224490003300244856010300277IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819400505 (Print)  cIIA Library  aLangenbeck, Peter, ed. 0aMicromachining Optical Components and Precision Engineeringh[eBook]  aWashington, USAbSPIEc1989  aOnline resource  aProceedings of SPIE; V. 1015  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/1015yClick Here to Access eBook