@book{28310,
	author = {Langenbeck, Peter, ed.},
	title = {Micromachining Optical Components and Precision Engineering},
	publisher = {SPIE},
	year = {1989},
	series = {Proceedings of SPIE; V. 1015},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1015}
}