TY  - BOOK
AU  - Maher, Mary Ann, ed.
TI  - Micromachining and Microfabrication Process Technology XI
T2  - Proceedings of SPIE; V. 6109
SN  - 9780819461513 (Print)
PY  - 2006///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6109
ER  -