TY  - BOOK
AU  - Yasaitis, John, ed.
TI  - Micromachining and Microfabrication Process Technology VIII
T2  - Proceedings of SPIE; V. 4979
SN  - 9780819447791 (Print)
PY  - 2003///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4979
ER  -