@book{28299,
	author = {Yasaitis, John, ed.},
	title = {Micromachining and Microfabrication Process Technology VIII},
	publisher = {SPIE},
	year = {2003},
	series = {Proceedings of SPIE; V. 4979},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4979}
}