TY  - BOOK
AU  - Smith, James, ed.
TI  - Micromachining and Microfabrication Process Technology V
T2  - Proceedings of SPIE; V. 3874
SN  - 9780819434715 (Print)
PY  - 1999///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3874
ER  -