@book{28296,
	author = {Smith, James, ed.},
	title = {Micromachining and Microfabrication Process Technology V},
	publisher = {SPIE},
	year = {1999},
	series = {Proceedings of SPIE; V. 3874},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3874}
}