TY  - BOOK
AU  - Maher, Mary Ann, ed.
TI  - Micromachining and Microfabrication Process Technology IX
T2  - Proceedings of SPIE; V. 5342
SN  - 9780819452504 (Print)
PY  - 2003///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5342
ER  -