00522nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002500092245007100117260003200188300002000220490003300240856010300273IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819452504 (Print)  cIIA Library  aMaher, Mary Ann, ed. 0aMicromachining and Microfabrication Process Technology IXh[eBook]  aWashington, USAbSPIEc2003  aOnline resource  aProceedings of SPIE; V. 5342  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/5342yClick Here to Access eBook