@book{28295,
	author = {Maher, Mary Ann, ed.},
	title = {Micromachining and Microfabrication Process Technology IX},
	publisher = {SPIE},
	year = {2003},
	series = {Proceedings of SPIE; V. 5342},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5342}
}