TY  - BOOK
AU  - Smith, James, ed.
TI  - Micromachining and Microfabrication Process Technology IV
T2  - Proceedings of SPIE; V. 3511
SN  - 9780819429704 (Print)
PY  - 1998///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3511
ER  -