TY  - BOOK
AU  - Chang, Shih-Chia, ed.
TI  - Micromachining and Microfabrication Process Technology III
T2  - Proceedings of SPIE; V. 3223
SN  - 9780819426550 (Print)
PY  - 1997///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3223
ER  -