00524nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002600092245007200118260003200190300002000222490003300242856010300275IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819426550 (Print)  cIIA Library  aChang, Shih-Chia, ed. 0aMicromachining and Microfabrication Process Technology IIIh[eBook]  aWashington, USAbSPIEc1997  aOnline resource  aProceedings of SPIE; V. 3223  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/3223yClick Here to Access eBook