Chang, Shih-Chia, ed. <br/><br/>
Micromachining and Microfabrication Process Technology III  [eBook] 

 - Washington, USA  SPIE  1997 
 - Online resource 
 - Proceedings of SPIE; V. 3223 .
<br/><br/><label>ISBN: </label>9780819426550 (Print)