@book{28293,
	author = {Chang, Shih-Chia, ed.},
	title = {Micromachining and Microfabrication Process Technology III},
	publisher = {SPIE},
	year = {1997},
	series = {Proceedings of SPIE; V. 3223},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3223}
}