TY  - BOOK
AU  - Pang, Stella, ed.
TI  - Micromachining and Microfabrication Process Technology II
T2  - Proceedings of SPIE; V. 2879
SN  - 9780819422774 (Print)
PY  - 1996///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2879
ER  -