TY  - BOOK
AU  - Chau, Kevin, ed.
TI  - Micromachining and Microfabrication
T2  - Proceedings of SPIE; V. 4230
SN  - 9780819439024 (Print)
PY  - 2000///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4230
ER  -