00496nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002100092245004900113260003200162300002000194490003300214856010300247IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819439024 (Print)  cIIA Library  aChau, Kevin, ed. 0aMicromachining and Microfabricationh[eBook]  aWashington, USAbSPIEc2000  aOnline resource  aProceedings of SPIE; V. 4230  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/4230yClick Here to Access eBook