TY  - BOOK
AU  - Michalske, Terry, ed.
TI  - Micromachining and Imaging
T2  - Proceedings of SPIE; V. 3009
SN  - 9780819424204 (Print)
PY  - 1997///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3009
ER  -