00492nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002600092245004000118260003200158300002000190490003300210856010300243IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819424204 (Print)  cIIA Library  aMichalske, Terry, ed. 0aMicromachining and Imagingh[eBook]  aWashington, USAbSPIEc1997  aOnline resource  aProceedings of SPIE; V. 3009  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/3009yClick Here to Access eBook