TY  - BOOK
AU  - French, Paddy, ed.
TI  - Micromachined Devices and Components IV
T2  - Proceedings of SPIE; V. 3514
SN  - 9780819429735 (Print)
PY  - 1998///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3514
ER  -