00502nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002300092245005300115260003200168300002000200490003300220856010300253IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819429735 (Print)  cIIA Library  aFrench, Paddy, ed. 0aMicromachined Devices and Components IVh[eBook]  aWashington, USAbSPIEc1998  aOnline resource  aProceedings of SPIE; V. 3514  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/3514yClick Here to Access eBook