@book{28285,
	author = {French, Paddy, ed.},
	title = {Micromachined Devices and Components IV},
	publisher = {SPIE},
	year = {1998},
	series = {Proceedings of SPIE; V. 3514},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3514}
}