TY  - BOOK
AU  - Chau, Kevin, ed.
TI  - Micromachined Devices and Components III
T2  - Proceedings of SPIE; V. 3224
SN  - 9780819426567 (Print)
PY  - 1997///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3224
ER  -