TY  - BOOK
AU  - Chau, Kevin, ed.
TI  - Micromachined Devices and Components II
T2  - Proceedings of SPIE; V. 2882
SN  - 9780819422804 (Print)
PY  - 1996///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2882
ER  -