@book{28283,
	author = {Chau, Kevin, ed.},
	title = {Micromachined Devices and Components II},
	publisher = {SPIE},
	year = {1996},
	series = {Proceedings of SPIE; V. 2882},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2882}
}