@book{28280,
	author = {Friedrich, Craig, ed.},
	title = {Microlithography and Metrology in Micromachining III},
	publisher = {SPIE},
	year = {1997},
	series = {Proceedings of SPIE; V. 3225},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3225}
}